Observation of strongly enhanced photoluminescence from inverted cone-shaped silicon nanostuctures

Supplementary information S1: SEM micrographs of four SiNCs (tilt 70°) and one SiNW (tilt 45°) fabricated by cryogenic RIE with SF6 and O2 chemistry (scale bar is 1μm). Masking is performed with silica spheres (diameter 1μm). Different shapes can be realized by the adjustment of O2 concentration in the plasma that results in a different amount of under etching. The table gives the geometrical parameters of the produced nanostructures as determined by SEM and an image processing software.